Is the nucleation and coalescence behavior in the growth of a-Si:H films prepared by the CAT-CVD different?

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Elsevier

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Photo-induced volume changes in a-Si:H films prepared by Cat-CVD method

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Light-emitting Si prepared by laser annealing of a-Si:H

By El-Kader K.M.A.   Ulrych I.   Chab V.   Oswald J.   Kubat P.   Engst P.   Stuchlik J.   Fejfar A.   Cerny R.   Pelant I.   Kocka J.  

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Formation of low-resistivity poly-Si and SiN x films by Cat-CVD for ULSI application

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Spectroscopic ellipsometry study of interfaces and crystallization behavior during annealing of a-Si:H films

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