A study of Al/Si 3 N 4 /ultrathin Si/GaAs structures by DLTS and C-V measurements

Author： Pinck E.   Bartos J.   Brunner R.   Ivanco J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.433, Iss.1, 2003-06, pp. : 352-358

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