Determination of the interdiffusion coefficient for Si/Al multilayers by Auger electron spectroscopical sputter depth profiling

Author: Wang J.Y.   Zalar A.   Zhao Y.H.   Mittemeijer E.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.433, Iss.1, 2003-06, pp. : 92-96

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Abstract