Hydrophobic CN x thin film growth by inductively-coupled RF plasma enhanced pulsed laser deposition

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Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma

By Suda Y.   Nishimura T.   Ono T.   Akazawa M.   Sakai Y.   Homma N.  

Thin Solid Films, Vol. 374, Iss. 2, 2000-10 ,pp. : 287-290

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Cubic boron nitride thin film synthesis on silica substrates by low-pressure inductively-coupled r.f. plasma chemical vapor deposition

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Thin Solid Films, Vol. 354, Iss. 1, 1999-10 ,pp. : 24-28

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Plasma-induced damage in PZT thin films etched by inductively coupled plasma

By Kang M.-G.   Kim K.-T.   Kim C.-I.  

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The influence of the inductively-coupled hydrogen plasma on the GaAs surface properties

By Pinck E.   Jergel M.   Kucera M.   Brunel M.  

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