Structure of DC sputtered Si&unknown;C&unknown;N thin films

Author: Radnoczi G.   Safran G.   Czigany Z.   Berlind T.   Hultman L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.440, Iss.1, 2003-09, pp. : 41-44

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Abstract