Comparative study on structure and internal stress in tin-doped indium oxide and indium-zinc oxide films deposited by r.f. magnetron sputtering

Author： Sasabayashi T. Ito N. Nishimura E. Kon M. Song P.K. Utsumi K. Kaijo A. Shigesato Y.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.445, Iss.2, 2003-12, pp. : 219-223

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