Microstructures of ITO films deposited by d.c. magnetron sputtering with H 2 O introduction

Author： Nishimura E.   Ohkawa H.   Song P.K.   Shigesato Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.445, Iss.2, 2003-12, pp. : 235-240

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