Study on In 2 O 3 -SnO 2 transparent and conductive films prepared by d.c. sputtering using high density ceramic targets

Author： Utsumi K.   Iigusa H.   Tokumaru R.   Song P.K.   Shigesato Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.445, Iss.2, 2003-12, pp. : 229-234

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