The fabrication of thin GaAs cantilever beams for power sensor microsystem using RIE

Author: Hasscik S.   Kuzmik J.   Porges M.   Mozolova Z.   Lalinsky T.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.10, 1996-10, pp. : 1215-1217

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Abstract