Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges

Author： Viera G.   Sharma S.N.   Zhang R.Q.   Andujar J.L.   Bertran E.   Costa J.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.48, Iss.7, 1997-09, pp. : 665-668

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