Cubic boron nitride films deposited by unbalanced RF magnetron sputtering and pulsed DC substrate bias

Author: Ding X.Z.   Zeng X.T.   Xie H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.429, Iss.1, 2003-04, pp. : 22-27

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Abstract