Deposition and characterisation of carbon-containing tungsten coatings prepared by reactive magnetron sputtering

Author: Rebholz C.   Schneider J.M.   Ziegele H.   Rahle B.   Leyland A.   Matthews A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.49, Iss.4, 1998-04, pp. : 265-272

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Abstract