Author: Buc D. Hotovy I. Hascik S. Cerven I.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.50, Iss.1, 1998-05, pp. : 121-123
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Properties of aluminium oxide thin films deposited by reactive magnetron sputtering
By Koski K. Holsa J. Juliet P.
Thin Solid Films, Vol. 339, Iss. 1, 1999-02 ,pp. :
Nanostructure of ZnO thin films prepared by reactive rf magnetron sputtering
By Takai O. Futsuhara M. Shimizu G. Lungu C.P. Nozue J.
Thin Solid Films, Vol. 318, Iss. 1, 1998-04 ,pp. :
Growth and nanostructure of InN thin films deposited by reactive magnetron sputtering
Thin Solid Films, Vol. 318, Iss. 1, 1998-04 ,pp. :