Properties of palladium silicide thin films obtained by vacuum rapid thermal annealing of r.f. sputtered Pd films on Si

Author： Beshkov G. Dimitrov D.B. Koprinarova J. Gesheva K.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.2, 1998-10, pp. : 177-180

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Effect of vacuum rapid thermal annealing on the properties of SiN x films

By Beshkov G. Dimitrov D.B. Velchev N. Petrov P. Ivanov B. Zambov L. Dimitrova T.

Vacuum, Vol. 58, Iss. 2, 2000-08 ,pp. : 509-515

Elsevier

Access to resources Recommend Favorite

Annealing effects on the structure and mechanical properties of r.f.-sputtered Cr-B hard thin films

By Zhou M. Nose M. Makino Y. Nogi K.

Thin Solid Films, Vol. 359, Iss. 2, 2000-01 ,pp. : 165-170

Elsevier

Access to resources Recommend Favorite

Thin CNx films prepared by vacuum rapid thermal annealing

By Beshkov G. Dimitrov D.B. Georgiev S. Petrov P. Zambov L. Ivanov B. Popov C. Georgiev M.

Vacuum, Vol. 51, Iss. 2, 1998-10 ,pp. : 169-172

Elsevier

Access to resources Recommend Favorite

Influence of vacuum rapid thermal annealing on the properties of Al and Ag films on quartz

By Lasarova V. Beshkov G. Spassov L.

Vacuum, Vol. 47, Iss. 11, 1996-11 ,pp. : 1329-1331

Elsevier

Access to resources Recommend Favorite

Influence of vacuum rapid thermal annealing on the properties of PCVD SiO 2 and SiO 2 .P 2 O 5 films

By Dimitrov D.B. Beshkova M. Dafinova R.

Vacuum, Vol. 58, Iss. 2, 2000-08 ,pp. : 485-489

Elsevier

Access to resources Recommend Favorite