Impulse irradiation plasma technology for film deposition

Author: Fetisov I.K.   Filippov A.A.   Khodachenko G.V.   Mozgrin D.V.   Pisarev A.A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.53, Iss.1, 1999-05, pp. : 133-136

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Abstract