Development of biased directional sputtering (BDS) for barrier metal formation

Author: Sato H.   Sato M.   Tagami M.   Funato K.   Sasaki M.   Taguchi S.   Mizuno S.   Kobayashi M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.59, Iss.2, 2000-11, pp. : 437-444

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Abstract