Some growth peculiarities of a-C:H films in ECR microwave plasma

Author: Kulikovsky V.   Shaginyan L.   Jastrabik L.   Soukup L.   Bohac P.   Musil J.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.60, Iss.3, 2001-03, pp. : 315-323

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Abstract