Amorphous ZnO-In 2 O 3 transparent conductive films by simultaneous sputtering method of ZnO and In 2 O 3 targets

Author： Tominaga K. Takao T. Fukushima A. Moriga T. Nakabayashi I.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.66, Iss.3, 2002-08, pp. : 505-509

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