Structure and chemistry of SiO x (x<2) systems

Author： Barranco A.   Yubero F.   Espinos J.P.   Holgado J.P.   Caballero A.   Gonzalez-Elipe A.R.   Mejias J.A.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.67, Iss.3, 2002-09, pp. : 491-499

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