On the resolution of semiconductor multilayers with a scanning electron microscope

Author： Merli P.G.   Migliori A.   Nacucchi M.   Govoni D.   Mattei G.  

Publisher： Elsevier

ISSN： 0304-3991

Source： Ultramicroscopy, Vol.60, Iss.2, 1995-09, pp. : 229-239

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