The effect of small-signal AC voltages on C-V characterization and parameter extraction of SiO 2 thin films

Author： Zhang H.   Gurang P.   Sigh N.   Manuel Q.   Wallace R.   Gnade B.   Stokes K.  

Publisher： Elsevier

ISSN： 0026-2714

Source： Microelectronics Reliability, Vol.43, Iss.12, 2003-12, pp. : 1981-1985

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