Point defects in silicon crystals studied via complexes with hydrogen

Author: Suezawa M.   Fukata N.   Takada Y.   Taniguchi R.   Hori F.   Oshima R.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 258-267

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Abstract