Crystallization and disappearance of defects of the annealed silicon nanowires

Author: Niu J.   Sha J.   Wang Y.   Ma X.   Yang D.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 65-69

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Abstract