Hydrogen penetration into silicon during wet-chemical etching

Author: Weber J.   Knack S.   Feklisova O.V.   Yarykin N.A.   Yakimov E.B.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 320-326

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