Optical anisotropy in dislocation-free silicon single crystals

Author: Chu T.   Yamada M.   Donecker J.   Rossberg M.   Alex V.   Riemann H.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 327-332

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Abstract