Preparation of hafnium oxide thin film by electron beam evaporation of hafnium incorporating a post thermal process

Author： Xing S.   Zhang N.   Song Z.   Shen Q.   Lin C.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 451-456

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