Author: Naumova O.V. Antonova I.V. Popov V.P. Sapognikova N.V. Nastaushev Y.V. Spesivtsev E.V. Aseev A.L.
Publisher: Elsevier
ISSN: 0167-9317
Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 457-462
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Abstract
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