Author: Ohyama H. Hayama K. Takakura K. Miura T. Shigaki K. Jono T. Simoen E. Poyai A. Claeys C.
Publisher: Elsevier
ISSN: 0167-9317
Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 517-521
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