![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Fedotov A. Saad A.M.H. Enisherlova K. Mazanik A. Gorachev B.G. Temper E.M.
Publisher: Elsevier
ISSN: 0167-9317
Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 522-529
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
By Mordvintsev V. Kudryavtsev S. Levin V. Tsvetkova L.
Russian Microelectronics, Vol. 39, Iss. 5, 2010-09 ,pp. :