Electrical properties of Si/SiO 2 /Si structures produced by direct bonding of pre-oxidized silicon wafers

Author： Fedotov A.   Saad A.M.H.   Enisherlova K.   Mazanik A.   Gorachev B.G.   Temper E.M.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 522-529

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