Self-excited piezoelectric microcantilever for gas detection

Author: Zhou J.   Li P.   Zhang S.   Huang Y.   Yang P.   Bao M.   Ruan G.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.69, Iss.1, 2003-08, pp. : 37-46

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Abstract