Effect of SiO 2 Powder on Mirror Polishing of InP Wafers

Author: Morisawa Yuji   Kikuma Isao   Takayama Naoki   Takeuchi Manabu  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.1, 1997-12, pp. : 34-36

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