Author: Park S. Kim Y. Kwak J. Baik H.
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.26, Iss.3, 1997-03, pp. : 172-177
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Hatayama Tomoaki Tanaka Norihiro Fuyuki Takashi Matsunami Hiroyuki
Journal of Electronic Materials, Vol. 26, Iss. 3, 1997-03 ,pp. :
Three-dimensional atom probe investigation of Co/Al thin film reaction
By Vovk V. Schmitz G. Kirchheim R.
Microelectronic Engineering, Vol. 70, Iss. 2, 2003-11 ,pp. :