Characterization of reactive ion etching-induced damage to n-GaN surfaces using schottky diodes

Author: Ping A.   Schmitz A.   Adesida I.   Khan M.   Chen Q.   Yang J.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.3, 1997-03, pp. : 266-271

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract