Ion implantation doping of OMCVD grown GaN

Author: Edwards A.   Rao Mulpuri   Molnar B.   Wickenden A.   Holland W.   Chi P.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.3, 1997-03, pp. : 334-339

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