Control of the structure and surface morphology of gallium nitride and aluminum nitride thin films by nitrogen background pressure in pulsed laser deposition

Author: Sudhir G.   Fujii H.   Wong W.   Kisielowski C.   Newman N.   Dieker C.   Liliental-Weber Z.   Rubin M.   Weber E.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.27, Iss.4, 1998-04, pp. : 215-221

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