Effect of dissolved oxygen on thermal oxidation in Ta 2 O 5 /Ta sandwiches

Author: Pozdeev-Freeman Yu.   Gladkikh A.   Karpovski M.   Palevski A.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.27, Iss.9, 1998-09, pp. : 1034-1037

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Abstract