Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut

Author： Lu Xiang Iyer S. Lee Jin Doyle Brian Fan Zhineng Chu Paul Hu Chenming Cheung Nathan

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.27, Iss.9, 1998-09, pp. : 1059-1066

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