Comparative study on the effect of misalignment on bordered and borderless contacts

Author： Huang J.   Oates A.   Kang S.   Shofner T.   Ashton R.   Obeng Y.  

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.30, Iss.4, 2001-04, pp. : 360-366

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