Heavily Aluminum-Doped Epitaxial Layers for Ohmic Contact Formation to p -Type 4H-SiC Produced by Low-Temperature Homoepitaxial Growth

Author: Krishnan B.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.39, Iss.1, 2010-01, pp. : 34-38

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Abstract