Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics

Author: Gautier J.   Delmotte F.   Bridou F.   Ravet M.F.   Varniere F.   Roulliay M.   Jerome A.   Vickridge I.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.88, Iss.4, 2007-09, pp. : 719-725

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Abstract