On the issue of an equivalent oxide thickness evaluation in nanoscale MISFETs

Author： Krasnikov G.   Zaitsev N.   Matyushkin I.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.40, Iss.1, 2011-01, pp. : 25-30

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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