Influence of growth parameters on properties of electroceramic thin films grown via MO-CVD

Author: Padeletti G.   Viticoli M.   Cusma A.   Ingo G.M.   Santoni A.   Loreti S.   Minarini C.   Viticoli S.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 105-114

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