Author: Padeletti G. Viticoli M. Cusma A. Ingo G.M. Santoni A. Loreti S. Minarini C. Viticoli S.
Publisher: Elsevier
ISSN: 1369-8001
Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 105-114
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Abstract