Low temperature preparation of piezoelectric thin films by ultraviolet-assisted rapid thermal processing

Author： Pardo L. Poyato R. Gonzalez A. Calzada M.L.

Publisher： Elsevier

ISSN： 1369-8001

Source： Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 77-83

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