Electrical properties of ultrathin oxide grown by high pressure oxidation and N2O nitridation for ULSI device applications

Author: Roh Tae Moon   Lee Dae Woo   Kim Jongdae   Koo Jin Gun   Nam Kee Soo   Lee Duk-Dong  

Publisher: Taylor & Francis Ltd

ISSN: 1362-3060

Source: International Journal of Electronics, Vol.88, Iss.4, 2001-04, pp. : 423-434

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content