Deposition of Nanoscale Films with Fractal Topography

Author： Serov I. N.   Margolin V. I.   Potsar N. A.   Soltovskaya I. A.   Tupik V. A.   Fantikov V. S.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.33, Iss.5, 2004-09, pp. : 263-270

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