Electroless deposition of novel Ag-W thin films

Author： Bogush V. Inberg A. Croitoru N. Dubin V. Shacham-Diamand Y.

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 489-494

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Electrical resistivity of thin electroless Ag-W films for metallization

By Glickman E.E. Bogush V. Inberg A. Shacham-Diamand Y. Croitoru N.

Microelectronic Engineering, Vol. 70, Iss. 2, 2003-11 ,pp. : 495-500

Elsevier

Access to resources Recommend Favorite

Material and electrical properties of electroless Ag-W thin film

By Inberg A. Shacham-Diamand Y. Rabinovich E. Golan G. Croitoru N.

Journal of Electronic Materials, Vol. 30, Iss. 4, 2001-04 ,pp. : 355-359

Springer Publishing Company

Access to resources Recommend Favorite

Electroless deposition of Co(W) thin films

By Sverdlov Y. Shacham-Diamand Y.

Microelectronic Engineering, Vol. 70, Iss. 2, 2003-11 ,pp. : 512-518

Elsevier

Access to resources Recommend Favorite

Microstructural investigation of electrodeposited CuAg-thin films

By Strehle S. Menzel S. Wendrock H. Acker J. Wetzig K.

Microelectronic Engineering, Vol. 70, Iss. 2, 2003-11 ,pp. : 506-511

Elsevier

Access to resources Recommend Favorite

Chemical solution deposition of PZT thin films for microelectronics

By Kosec M. Malic B. Mandeljc M.

Materials Science in Semiconductor Processing, Vol. 5, Iss. 2, 2002-04 ,pp. : 97-103

Elsevier

Access to resources Recommend Favorite