Square-Membrane Deflection and Stress: Identifying the Validity Range of a Calculation Procedure

Author: Gridchin V.   Grichenko V.   Lubimsky V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.34, Iss.3, 2005-05, pp. : 173-180

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Abstract