Measurements of linear dimensions of silicon nanorelief elements with a near-rectangular profile by defocusing the electron probe of a scanning electron microscope

Author： Valiev K.   Gavrilenko V.   Zhikharev E.   Danilova M.   Kal’nov V.   Larionov Yu.   Mityukhlyaev V.   Orlikovskii A.   Rakov A.   Todua P.   Filippov M.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.39, Iss.6, 2010-11, pp. : 394-400

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