Growth and characterisation of SiC films deposited on a-SiO2/Si (100) substrates

Author: Rodrŕguez-Viejo J.   Clavaguera N.   EI Felk Z.   Clavaguera-Mora M. T.   Arnaud G.   Camassel J.   Pascual J.   Berberich S.   Millán J.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.12, Iss.1, 1996-01, pp. : 98-102

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Abstract