Double Si nanocrystal layers grown by RPCVD for non-volatile memory applications

Author: Masarotto L   Molas G   Jalaguier E   Gay G   Colonna J P   Hartmann J M   Yckache K  

Publisher: IOP Publishing

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.26, Iss.2, 2011-02, pp. : 25008-25012

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